The Use of InSitu X-ray Diffraction, Optical Scattering and Resistance Analysis Techniques for Evaluation of Copper Diffusion Barriers in Blanket Films and Danascene Structures
Journal Article
·
· Thin Solid Films
No abstract prepared.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 796659
- Journal Information:
- Thin Solid Films, Vol. 397, Issue 1-2; Other Information: PBD: 1 Oct 2001; ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- English
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