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Estimation of the electron beam energy spread for TEM information limit

Conference ·
OSTI ID:796094
Sub-Angstrom TEM of materials requires focal-series reconstruction (FSR) or electron holography to retrieve the electron wave at the specimen exit-surface to very high resolution. As a consequence, we need to measure the microscope information limit. With a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM has achieved sub-Angstrom resolution by FSR. We present a new method of estimating the information limit of the microscope, based on energy-spread measurements with an image filter.
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
796094
Report Number(s):
LBNL--49641
Country of Publication:
United States
Language:
English