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Measurement of the energy-spread contribution to information transfer limits in HR-TEM

Conference ·
OSTI ID:793774
Sub-Angstrom TEM of materials at intermediate voltages requires a sub-Angstrom information limit for the microscope. With a Scherzer resolution of 1.7 Angstrom, but a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM is able to generate resolution below 0.8 Angstrom. Microscope information limit comes from damping of transfer by the temporal coherence. A major term contributing to temporal coherence is energy spread in the electron beam. We derive a new expression for the energy spread, and show how it can be measured from the result that is obtained using a standard electron spectrometer.
Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., CA (US)
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
793774
Report Number(s):
LBNL--49677
Country of Publication:
United States
Language:
English