X-ray emission study of ion beam mixed Cu/Al films on polyimide

Journal Article · Wed Mar 31 04:00:00 EST 1999 · Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.581623· OSTI ID:794526

Kurmaev, Ernst Z ^[1]; Zatsepin, D A; Winarski, Robert P; Stadler, Shane; Ederer, David L; Moewes, Alexander P; Fedorenko, V V; Shamin, S N; Galakhov, V R; Chang, G S; Whang, C N

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1. LBNL Library

No abstract prepared.

• Research Organization: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 794526
• Report Number(s): LBNL/ALS--1110
• Journal Information: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films Journal Issue: 2 Vol. 17
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
ALUMINIUM
COPPER
FILMS
IMIDES
ION BEAMS