Microfabrication of freestanding metal structures released from graphite substrates.
A sacrificial layer is usually used to release electroformed microstructures. Because of the chemistry applied to the sacrificial layer, only a limited number of metals can be used for electroforming. A novel method to fabricate freestanding electroformed copper structures is presented. A graphite substrate allows the release of the metal part, by abrasive removal of the graphite after electroforming. Results on fabrication of high-aspect-ratio freestanding copper grids are presented; these can be used as x-ray collimator in medical imaging to reduce scattered radiation. This process has potential application to the fabrication of injection molds and microparts on pick-and-place carriers for microelectromechanical systems (MEMS).
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 792133
- Report Number(s):
- ANL/XFD/CP-105749; ISSN 0148-7191
- Country of Publication:
- United States
- Language:
- English
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