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Dual-domain point diffraction interferometer

Journal Article · · Applied Optics
OSTI ID:773723
 [1];
  1. LBNL Library
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No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab., CA (US)
Sponsoring Organization:
USDOE Director, Office of Energy Research (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
773723
Report Number(s):
LBNL--42167
Journal Information:
Applied Optics, Journal Name: Applied Optics Journal Issue: 16 Vol. 38; ISSN APOPAI; ISSN 0003-6935
Country of Publication:
United States
Language:
English

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Related Subjects

47 OTHER INSTRUMENTATION
DIFFRACTION
EXTREME ULTRAVIOLET INTERFEROMETRY INTERFEROMETRY PHASE-SHIFTING INTERFEROMETRY FOURIER-DOMAIN FRINGE ANALYSIS POINT DIFFRACTION INTERFEROMETER EXTREME ULTRAVIOLET LITHOGRAPHY
EXTREME ULTRAVIOLET RADIATION
INTERFEROMETERS
INTERFEROMETRY
PHASE SHIFT