Dual-domain point diffraction interferometer
- Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
The phase-shifting point diffraction interferometer has recently been developed and implemented at Lawrence Berkeley National Laboratory to meet the significant metrology challenge of characterizing extreme ultraviolet projection lithography systems. Here we present a refined version of this interferometer that overcomes the original design{close_quote}s susceptibility to noise attributed to scattered light. The theory of the new hybrid spatial- and temporal-domain (dual-domain) point diffraction interferometer is described in detail and experimental results are presented. {copyright} 1999 Optical Society of America
- OSTI ID:
- 357257
- Journal Information:
- Applied Optics, Journal Name: Applied Optics Journal Issue: 16 Vol. 38; ISSN APOPAI; ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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