Integrated Micro-Machined Hydrogen Gas Sensor. Final Report
This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstrate the feasibility of using micro-hotplates structures in conjunction with palladium+coated metal-hydride films for sensing hydrogen in many of the environments required by a hydrogen based energy economy. Based on these findings, they propose to continue and expand the development of this technology in Phase II.
- Research Organization:
- Advanced Technology Materials, Inc., Danbury, CT (US)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EE) (US)
- DOE Contract Number:
- FC36-99GO10451
- OSTI ID:
- 769155
- Report Number(s):
- DOE/GO/10451-F; TRN: US200716%%342
- Resource Relation:
- Other Information: PBD: 2 Oct 2000
- Country of Publication:
- United States
- Language:
- English
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