Integrated Micro-Machined Hydrogen Gas Sensor. Final Report
Abstract
This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstratemore »
- Authors:
- Publication Date:
- Research Org.:
- Advanced Technology Materials, Inc., Danbury, CT (US)
- Sponsoring Org.:
- USDOE Office of Energy Efficiency and Renewable Energy (EE) (US)
- OSTI Identifier:
- 769155
- Report Number(s):
- DOE/GO/10451-F
TRN: US200716%%342
- DOE Contract Number:
- FC36-99GO10451
- Resource Type:
- Technical Report
- Resource Relation:
- Other Information: PBD: 2 Oct 2000
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 08 HYDROGEN; FABRICATION; HUMIDITY; HYDROGEN; HYDROGEN-BASED ECONOMY; OXYGEN; PERFORMANCE; SENSITIVITY; STABILITY; TESTING; THIN FILMS; VELOCITY
Citation Formats
DiMeo, Jr, Frank. Integrated Micro-Machined Hydrogen Gas Sensor. Final Report. United States: N. p., 2000.
Web. doi:10.2172/769155.
DiMeo, Jr, Frank. Integrated Micro-Machined Hydrogen Gas Sensor. Final Report. United States. https://doi.org/10.2172/769155
DiMeo, Jr, Frank. 2000.
"Integrated Micro-Machined Hydrogen Gas Sensor. Final Report". United States. https://doi.org/10.2172/769155. https://www.osti.gov/servlets/purl/769155.
@article{osti_769155,
title = {Integrated Micro-Machined Hydrogen Gas Sensor. Final Report},
author = {DiMeo, Jr, Frank},
abstractNote = {This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstrate the feasibility of using micro-hotplates structures in conjunction with palladium+coated metal-hydride films for sensing hydrogen in many of the environments required by a hydrogen based energy economy. Based on these findings, they propose to continue and expand the development of this technology in Phase II.},
doi = {10.2172/769155},
url = {https://www.osti.gov/biblio/769155},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Oct 02 00:00:00 EDT 2000},
month = {Mon Oct 02 00:00:00 EDT 2000}
}