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Title: Integrated Micro-Machined Hydrogen Gas Sensor. Final Report

Abstract

This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstratemore » the feasibility of using micro-hotplates structures in conjunction with palladium+coated metal-hydride films for sensing hydrogen in many of the environments required by a hydrogen based energy economy. Based on these findings, they propose to continue and expand the development of this technology in Phase II.« less

Authors:
Publication Date:
Research Org.:
Advanced Technology Materials, Inc., Danbury, CT (US)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EE) (US)
OSTI Identifier:
769155
Report Number(s):
DOE/GO/10451-F
TRN: US200716%%342
DOE Contract Number:  
FC36-99GO10451
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: 2 Oct 2000
Country of Publication:
United States
Language:
English
Subject:
08 HYDROGEN; FABRICATION; HUMIDITY; HYDROGEN; HYDROGEN-BASED ECONOMY; OXYGEN; PERFORMANCE; SENSITIVITY; STABILITY; TESTING; THIN FILMS; VELOCITY

Citation Formats

DiMeo, Jr, Frank. Integrated Micro-Machined Hydrogen Gas Sensor. Final Report. United States: N. p., 2000. Web. doi:10.2172/769155.
DiMeo, Jr, Frank. Integrated Micro-Machined Hydrogen Gas Sensor. Final Report. United States. https://doi.org/10.2172/769155
DiMeo, Jr, Frank. 2000. "Integrated Micro-Machined Hydrogen Gas Sensor. Final Report". United States. https://doi.org/10.2172/769155. https://www.osti.gov/servlets/purl/769155.
@article{osti_769155,
title = {Integrated Micro-Machined Hydrogen Gas Sensor. Final Report},
author = {DiMeo, Jr, Frank},
abstractNote = {This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstrate the feasibility of using micro-hotplates structures in conjunction with palladium+coated metal-hydride films for sensing hydrogen in many of the environments required by a hydrogen based energy economy. Based on these findings, they propose to continue and expand the development of this technology in Phase II.},
doi = {10.2172/769155},
url = {https://www.osti.gov/biblio/769155}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Oct 02 00:00:00 EDT 2000},
month = {Mon Oct 02 00:00:00 EDT 2000}
}