Stable products and some kinetic features of dichlorosilane-air combustion
Journal Article
·
· Kinetics and Catalysis
OSTI ID:75520
- Institute of Structural Macrokinetics, Moscow (Russian Federation)
The ignition and combustion of silanes is important in the manufacturing of solid products used in the microelectronics industry. In this study, the amounts of H{sub 2}, HCl, and H{sub 2}O in the reaction products of the combustion of dichlorosilane-air mixtures containing from 1 to 100% of dichlorosilane were determined. The explosion concentration limits (2.4 and 94%) were estimated under standard conditions and the effect of an inert gas (N{sub 2}) on these limits was studied. The promoting action of dichlorosilane oxidation on its decomposition and on two-stage explosion, which is accompanied by a propagation of a chemical reaction wave in a closed volume, was established.
- OSTI ID:
- 75520
- Journal Information:
- Kinetics and Catalysis, Journal Name: Kinetics and Catalysis Journal Issue: 2 Vol. 36; ISSN 0023-1584; ISSN KICAA8
- Country of Publication:
- United States
- Language:
- English
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