Kinetic regularities and products of the thermal decomposition of dichlorosilane
Journal Article
·
· Kinetics and Catalysis
OSTI ID:75519
- Institute of Structural Macrokinetics, Moscow (Russian Federation)
The kinetics of the thermal decomposition of dichlorosilane is studied in quartz reactors, including reactors coated with MgO, in a stainless-steel reactor at 300-900K and 100-6500 Pa. Hydrogen, trichlorosilane, and tetrachlorosilane are found to be the principal reaction products. The conversion increases with temperature. The dependence of the decomposition rate on the dichlorosilane concentration is presented by the expression W=k[SiH{sub 2}Cl{sub 2}]{sup 3/2}; the effective activation energy is equal to 180{+-}12 kJ/mol.
- OSTI ID:
- 75519
- Journal Information:
- Kinetics and Catalysis, Journal Name: Kinetics and Catalysis Journal Issue: 2 Vol. 36; ISSN 0023-1584; ISSN KICAA8
- Country of Publication:
- United States
- Language:
- English
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