Single-step assembly of complex 3-D microstructures

Conference · Mon Jan 03 23:00:00 EST 2000

OSTI ID:750231

Hui, E E ^[1]; Howe, R T; Rodgers, M S

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1. Sandia National Laboratories

This paper describes three-dimensional microstructures fabricated in a planar process and assembled in a single step. Multiple plates are constrained by hinges in such a way as to reduce the assembly process to a single degree-of-freedom of motion. Serial microassembly of these structures is simpler; moreover, self-assembly using hydrodynamic forces during release is much more feasible than with earlier, multiple degree-of-freedom hinged structures. A 250-{micro}m corner cube reflector, a 6-sided closed box, and a 3-D model of the Berkeley Campanile clock tower have been demonstrated in the 4-level polysilicon SUMMiT MEMS foundry.

• Research Organization: Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 750231
• Report Number(s): SAND2000-0049C
• Country of Publication: United States
• Language: English

Related Subjects

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