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Neutron transmutation doping of polycrystalline silicon

Conference ·
OSTI ID:7363810

Chemical vapor deposition (CVD) of doped silane has been used by others to deposit a polycrytalline silicon film (polysil) on metal or graphite substrates, but dopant migration to grain boundaries during deposition apparently prohibits attaining a uniform or desired dopant concentration. In contrast, we have used neutron transmutation doping to introduce a uniform phosphorus dopant concentration in commercially available undoped CVD polysil at doping concentrations greater than or equal to 2 x 10/sup 15/ cm/sup -3/. Radiation damage annealing to 800/sup 0/C did not indicate dopant migration. Carrier mobility increased with doping concentration and the minority carrier lifetime (MCL) appears to be comparable to that of neutron transmutation doped (NTD) single crystal Si. Application of this technique to photovoltaic solar cell fabrication is discussed.

Research Organization:
Oak Ridge National Lab., Tenn. (USA)
OSTI ID:
7363810
Report Number(s):
CONF-760529-1
Country of Publication:
United States
Language:
English