Angular dependence of the emission of secondary ions along close-packed directions
Journal Article
·
· Sov. Phys. - Solid State (Engl. Transl.); (United States)
OSTI ID:7335408
A (001) face of a copper single crystal was bombarded with 20 kev neon ions. The sputtering intensity as a function of angle of incidence was studied. (AIP)
- Research Organization:
- M. V. Lomonosov State University, Moscow
- OSTI ID:
- 7335408
- Journal Information:
- Sov. Phys. - Solid State (Engl. Transl.); (United States), Vol. 18:6
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
COPPER
SPUTTERING
NEON IONS
COLLISIONS
ANGULAR DISTRIBUTION
KEV RANGE 10-100
CHARGED PARTICLES
DISTRIBUTION
ELEMENTS
ENERGY RANGE
IONS
KEV RANGE
METALS
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
GENERAL PHYSICS
COPPER
SPUTTERING
NEON IONS
COLLISIONS
ANGULAR DISTRIBUTION
KEV RANGE 10-100
CHARGED PARTICLES
DISTRIBUTION
ELEMENTS
ENERGY RANGE
IONS
KEV RANGE
METALS
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions