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U.S. Department of Energy
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Low concentration oxygen depth profiling by the /sup 16/O(d,. cap alpha. )/sup 14/N reaction

Conference ·
OSTI ID:7319943
The /sup 16/O(d,..cap alpha..)/sup 14/N nuclear reaction is used for depth profiling low levels of /sup 16/O by means of energy analysis of the emitted ..cap alpha..-particles. The analytic method for converting the emitted ..cap alpha..-spectra to concentration vs depth profiles is presented and the technique is applied to a variety of thin film structures. Experimental methods for enhancing the depth resolution and sensitivity are discussed, and depth resolutions of 130 A and sensitivities of 0.3 at. percent are demonstrated.
Research Organization:
Sandia Labs., Albuquerque, NM (USA)
DOE Contract Number:
EY-76-C-04-0789
OSTI ID:
7319943
Report Number(s):
SAND-77-0424C; CONF-770642-5
Country of Publication:
United States
Language:
English