Medium pressure diffusion plasma column in a coaxial cold cathode discharge
Journal Article
·
· Rev. Sci. Instrum.; (United States)
A quiet homogeneous cylindrical plasma column is produced by using a coaxial diffusion discharge tube at medium pressure (0.1--10 Torr) with a cold cathode dc discharge. The basic characteristics of this plasma are checked by an electrostatic probe. By varying the gas pressure and input power, electron densities can be obtained from 10/sup 6/ to 10/sup 11/ cm/sup -3/, and electron temperatures from 0.1 to a few eV. Using this plasma source, the advantage to the probe experiment is shown, and the possibility for time-independent measurements of the volume recombination coefficient is suggested.
- Research Organization:
- Department of Electrical Engineering, Musashi Institute of Technology, Tamazutsumi, Sedagaya-Ku, Tokyo, Japan
- OSTI ID:
- 7312243
- Journal Information:
- Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 48:3; ISSN RSINA
- Country of Publication:
- United States
- Language:
- English
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