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Pressure dependence of plasma parameters in medium-vacuum nitrogen arc discharge with the titanium cathode

Journal Article · · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA)
DOI:https://doi.org/10.1109/27.62363· OSTI ID:5755071
 [1];  [2]
  1. Dept. of Electrical Engineering, Kushiro National College of Technology, Otanoshike, Kushiro 084 (JP)
  2. Dept. of Electrical and Electronic Engineering, Toyohashi Univ. of Technology, Tenpaku, Toyohashi 441 (JP)
This paper is concerned with plasma properties of a medium-vacuum nitrogen arc discharge with the titanium cathodes. The arc chamber used is 400 mm in diameter and 600 mm, respectively. The experimental conditions are as follows: Pressure range = 1 {times} 10{sup {minus}3} {approximately} 2 {times} 10{sup {minus}1} torr; N{sub 2} gas flow rate = 6 ml/min; arc current = 50 A. Electric probe characteristics are measured as a function of pressure and distance from the cathode surface. The analytical results obtained from these measurements show that the electron energy distribution takes 1-Mx at pressures above 1 {times} 10{sup {minus}2} torr, whereas 2-Mx at pressure under 4 {times} 10{sup {minus}2} torr and the electron density have a maximum value at a certain pressure.
OSTI ID:
5755071
Journal Information:
IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA) Vol. 19:1; ISSN ITPSB; ISSN 0093-3813
Country of Publication:
United States
Language:
English

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