A new probe of metallization microstructure on semiconductor surfaces
- Univ. of Minnesota, Minneapolis (United States)
Synchrotron radiation photoemission spectroscopy studies of the Xe 4d core level emission from Xe atoms physisorbed on unreactive Yb-GaAs(110) and reactive Yb-Hg{sub 1-x}Cd{sub x}Te(110) interfaces allowed the authors to detect the presence of metallic islands and follow the coverage-dependent evolution of island composition and morphology. Measurements of local island work function, and local work function of the semiconductor surface between the islands can be performed if the ionization energy of the adsorbed Xe atoms is known a priori. They conducted systematic studies of Xe physisorption on a variety of elemental metallic films and cleaved semiconductor substrates, and found that the 4d ionization energy of the first layer Xe atoms physisorbed on metals is relatively constant (65.7{plus minus}0.1 eV). On cleaved semiconductor surfaces the apparent 4d ionization energy for Xe atoms adsorbed in the first of two physisorption sites is also relatively constant, but 0.6 eV higher than that observed on metals.
- OSTI ID:
- 7305968
- Report Number(s):
- CONF-910115--
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:4; ISSN 0734-211X; ISSN JVTBD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360602* -- Other Materials-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ARSENIC COMPOUNDS
ARSENIDES
BREMSSTRAHLUNG
CADMIUM COMPOUNDS
CADMIUM TELLURIDES
CHALCOGENIDES
CRYSTAL STRUCTURE
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
EMISSION SPECTROSCOPY
FLUIDS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GASES
IONIZATION POTENTIAL
MERCURY COMPOUNDS
MERCURY TELLURIDES
METALS
MICROSTRUCTURE
MORPHOLOGY
NONMETALS
PHOTOEMISSION
PNICTIDES
RADIATIONS
RARE EARTHS
RARE GASES
SECONDARY EMISSION
SORPTION
SORPTIVE PROPERTIES
SPECTROSCOPY
SURFACE PROPERTIES
SYNCHROTRON RADIATION
TELLURIDES
TELLURIUM COMPOUNDS
XENON
YTTERBIUM