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Charge yield and dose effects in MOS capacitors at 80/sup 0/K. Technical report

Technical Report ·
OSTI ID:7289374

The response of metal-oxide semiconductor capacitors to short-pulse high-energy electron irradiation was measured at 80/sup 0/K. It was confirmed that radiation-generated holes are almost totally retained in the SiO/sub 2/ layer regardless of oxide processing; this retention was exploited to determine carrier yield as a function of applied electric field. Evidence was found that the holes undergo an initial displacement under an applied field immediately following carrier generation (9.5 nm at 1,000,000 V/cm). Samples were subjected to pulsed irradiation at 80/sup 0/K to accumulated doses above 1,000,000 rads (SiO/sub 2/) and mechanisms which limit hole buildup above 50,000 rads (SiO/sub 2/) were explored. Electron-hole recombination in a low field region of the SiO/sub 2/ was identified as an important process and was modeled. Other mechanisms discussed include electron injection, field- and temperature-activated hole transport, applied field collapse, and dielectric breakdown.

Research Organization:
Harry Diamond Labs., Washington, DC (USA)
OSTI ID:
7289374
Report Number(s):
AD-A-039537; HDL-TR-1806
Country of Publication:
United States
Language:
English