YBa sub 2 Cu sub 3 O sub 7 nanobridges fabricated by direct-write electron beam lithography

Journal Article · Mon Sep 28 00:00:00 EDT 1992 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.107508· OSTI ID:7266737

Wendt, J R; Martens, J S; Ashby, C I.H.; Plut, T A; Hietala, V M; Tigges, C P; Ginley, D S ^[1]; Siegal, M P; Phillips, J M ^[2]; Hohenwarter, G K.G. ^[3]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)
2. AT T Bell Laboratories, Murray Hill, New Jersey 07974 (United States)
3. University of Wisconsin-Madison, ECE Department, Madison, Wisconsin 53706 (United States)

A direct method for nondamaging, nanometer-scale patterning of high {ital T}{sub {ital c}} superconductor thin films is presented. We have fabricated superconducting nanobridges in high-quality, epitaxial thin-film YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) by combining direct-write electron beam lithography and an improved aqueous etchant. Weak links with both length and width dimensions less than 20 nm have exhibited critical currents at 77 K of 4--20 {mu}A and {ital I}{sub {ital c}R{ital n}} products of 10--100 {mu}V which compare favorably with results for other YBCO junction technologies. We have used this technique in the fabrication of a shock-wave pulse former as an initial demonstration of its applicability to monolithic superconductive electronics.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 7266737
• Journal Information: Applied Physics Letters; (United States), Vol. 61:13; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
SURFACE TREATMENTS
COPPER OXIDES
SUPERCONDUCTING DEVICES
FABRICATION
YTTRIUM OXIDES
ELECTRIC BRIDGES
ETCHING
HIGH-TC SUPERCONDUCTORS
JOSEPHSON JUNCTIONS
SUPERCONDUCTING FILMS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
ELECTRICAL EQUIPMENT
EQUIPMENT
FILMS
JUNCTIONS
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
665412 - Superconducting Devices- (1992-)