Development of a microwave ion and plasma source immersed in a multicusp electron-cyclotron-resonant magnetic field

Thesis/Dissertation · Thu Jan 01 04:00:00 EST 1987

OSTI ID:7250865

Dahimene, M

Experimental development and test of an electrodeless microwave (2.45 GHz)-generated plasma and ion source in a discharge pressure range of 6 x 10 /sup -4/-5 x 10/sup -1/ Torr and relatively low power (80-350 W CW) are presented. Also presented is a semi-empirical model applicable to low-pressure microwave discharges with no static magnetic field. Initial experiments studied the properties of variable diffusion length (0.43-1.22 cm) disk-shaped discharges generated and maintained in a cylindrical microwave resonant-cavity applicator for argon and oxygen gases without a static magnetic field. These discharges were characterized by measuring plasma densities and electron temperatures using a Langmuir double probe for different experimental conditions. The measured plasma densities and electron temperatures ranged for 8 x 10/sup 10/ to 5 x 10 /sup 11/ cm/sup -3/ and 2 x 10/sup 4/ to 8 x 10/sup 4/ /sup 0/K, respectively. The ion temperature was less than 500 /sup 0/K. Ion beams were extracted from these discharges using single and double grids. Argon ion-beam currents densities were measured to be 3.0 mA/cm/sup 2/ for the single grid and 5.8 mA/cm/sup 2/ for the double grids with a maximum extraction voltage of 1.7 kV. This applicator was then retrofitted with magnets to study the effect of a multicusp static magnetic field. Using this concept, a new cylindrical microwave applicator was designed and tested.

• Research Organization: Michigan State Univ., East Lansing (USA)
• OSTI ID: 7250865
• Country of Publication: United States
• Language: English

Related Subjects

640410* -- Fluid Physics-- General Fluid Dynamics
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
BEAM EXTRACTION
BEAMS
ELECTRIC DISCHARGES
ELECTRON TEMPERATURE
ELEMENTS
FLUIDS
GASES
HEATING
ION BEAMS
ION SOURCES
ION TEMPERATURE
MICROWAVE HEATING
NONMETALS
OXYGEN
PLASMA
PLASMA DENSITY
RARE GASES