A 915 MHz/2. 45 GHz ECR plasma source for large area ion beam and plasma processing
Conference
·
· Review of Scientific Instruments; (USA)
OSTI ID:7003355
- Department of Electrical Engineering, Michigan State University, East Lansing, Michigan 48824-1226 (US)
The technology for producing uniform, high density (10{sup 11}--10{sup 12}/cm{sup 3}) microwave discharges over cross sections of 50 cm{sup 2} is well established. The present challenge is to extend the high density, and electrodeless benefits of microwave discharges to produce uniform densities over an area of 300--700 cm{sup 2}. Such discharges have important applications for 6 to 8-in. single wafer processing and as large surface, broad beam, high current density ion sources. The design principles for scaling the 18 cm diam MPDR ECR cavity applicator technology to 38--47 cm diam are reviewed. Microwave discharges with diameters of 20--30 cm can be created when these applicators are excited with either 2.45 GHz or 915 MHz. The design and construction of a prototype cavity applicator with a 20 cm diam discharge is described. The discharge is enclosed with a 12-pole multicusp static magnetic field produced by 2-in. by 2-in. by 1-in. rare-earth magnets. Each magnet has a pole face field strength of 3 kG. The experimental test of this plasma source in argon gas excited with 2.45 GHz energy is reviewed.
- OSTI ID:
- 7003355
- Report Number(s):
- CONF-890703--
- Conference Information:
- Journal Name: Review of Scientific Instruments; (USA) Journal Volume: 61:1
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
43 PARTICLE ACCELERATORS
430301* -- Particle Accelerators-- Ion Sources
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700101 -- Fusion Energy-- Plasma Research-- Confinement
Heating
& Production
ALUMINIUM
ARGON IONS
BEAMS
CAVITIES
CHARGED PARTICLES
CONTROL
DESIGN
ELECTROMAGNETIC RADIATION
ELECTRON DENSITY
ELEMENTS
ION BEAMS
ION SOURCES
IONS
MAGNETIC FIELDS
MEASURING METHODS
METALS
MICROWAVE RADIATION
PLASMA
PLASMA PRODUCTION
RADIATIONS
TEMPERATURE CONTROL
TESTING
430301* -- Particle Accelerators-- Ion Sources
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700101 -- Fusion Energy-- Plasma Research-- Confinement
Heating
& Production
ALUMINIUM
ARGON IONS
BEAMS
CAVITIES
CHARGED PARTICLES
CONTROL
DESIGN
ELECTROMAGNETIC RADIATION
ELECTRON DENSITY
ELEMENTS
ION BEAMS
ION SOURCES
IONS
MAGNETIC FIELDS
MEASURING METHODS
METALS
MICROWAVE RADIATION
PLASMA
PLASMA PRODUCTION
RADIATIONS
TEMPERATURE CONTROL
TESTING