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U.S. Department of Energy
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Advanced processing and characterization of semiconductors III

Conference ·
OSTI ID:7241560
This book presents the papers given at a conference on semiconductor materials. Topics considered at the conference included the structural characterization of defects in GaAs with ultrasonic measurements, the characterization of electron traps resulting from oxygen precipitation in Cz silicon, the pulsed laser processing of silicon by means of absorption by free carriers, rapid thermal annealing and solid phase epitaxy of ion implanted InP, opto-electronic effects, the epitaxial growth of semiconductors on stabilized zirconia single crystals, structure and electrical properties of metal-GaAs interfaces, and tantallum and niobium silicides formed by scanning electron beams.
OSTI ID:
7241560
Report Number(s):
CONF-860117-
Country of Publication:
United States
Language:
English