Effect of low pressure dc plasma discharge on laser ablated ferroelectric Pb(Zr,Ti)O sub 3 thin films
Journal Article
·
· Journal of Applied Physics; (United States)
- Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
Ferroelectric thin films of PZT (Pb(Zr,Ti)O{sub 3}) were deposited on platinum coated silicon and bare silicon by excimer laser (248 nm) ablation and were {ital in} {ital situ} crystallized, with and without an oxygen discharge. Films deposited at various oxygen discharge voltages exhibited variations in polarization switching, dielectric constant, and loss, and current-voltage ({ital I}-{ital V}) characteristics. Crystalline perovskite PZT films deposited with a discharge voltage of +300 V offered stoichiometric and crystalline films, with a dielectric constant of 850, a remnant polarization of 22 {mu}C/cm{sup 2}, and a coercive field of 40 kV/cm, a resistivity of about 10{sup 12} {Omega} cm and a charge storage density of as high as 100 fC/{mu}m{sup 2} at 5 V. Besides the property enhancement, the presence of O{sub 2}{sup +} discharge plasma appeared to have reduced the deposition temperature to relatively lower values (500 {degree}C).
- OSTI ID:
- 7238067
- Journal Information:
- Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 72:2; ISSN 0021-8979; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ABLATION
CRYSTALLIZATION
DEPOSITION
DIELECTRIC PROPERTIES
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
FERROELECTRIC MATERIALS
FILMS
LASER RADIATION
LEAD COMPOUNDS
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
POLARIZATION
PZT
RADIATIONS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ABLATION
CRYSTALLIZATION
DEPOSITION
DIELECTRIC PROPERTIES
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
FERROELECTRIC MATERIALS
FILMS
LASER RADIATION
LEAD COMPOUNDS
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
POLARIZATION
PZT
RADIATIONS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS