Synthesis and characterization of Pb(Zr{sub 0.54}Ti{sub 0.46})O{sub 3} thin films on (100)Si using textured YBa{sub 2}Cu{sub 3}O{sub 7-{delta}} and yttria-stabilized zirconia buffer layers by laser physical vapor deposition technique
- Los Alamos National Lab., NM (United States)
- North Carolina State Univ., Raleigh, NC (United States)
We have fabricated high-quality <00.1> textured Pb(Zr{sub 0.54} Ti{sub 0.46})O{sub 8} (PZT) thin films on (001)Si with interposing <001> textured YBa{sub 2}Cu{sub 3}O{sub 7-{delta}} (YBCO) and yttria-stabilized zirconia (YSZ) buffer layers using pulsed laser deposition (KrF excimer laser, {lambda} = 248 nm, {tau} = 20 nanosecs). The YBCO layer provides a seed for PZT growth and can also act as an electrode for the PZT films, whereas YSZ provides a diffusion barrier as well as a seed for the growth of YBCO films on (001)Si. These heterostructures were characterized using x-ray diffraction, high-resolution transmission electron microscopy, and Rutherford backscattering techniques. The YSZ films were deposited in oxygen ambient ({minus}9 x 10{sup {minus}4} Torr) at 775{degree}C on (001)Si substrate having <001> YSZ // <001> Si texture. The YBCO thin films were deposited in-situ in oxygen ambient (200 mTorr) at 650{degree}C. The temperature and oxygen ambient for the PZT deposition were optimized to be 530{degree}C and 0.4-0.6 Torr, respectively. The laser fluence to deposit this multilayer structure was 2.5-5.0 J/cm{sup 2}. The <001> textured perovskite PZT films showed a dielectric constant of 800-1000, a saturation polarization of 37.81 {mu}C/cm{sup 2}, remnant polarization of 24.38 {mu}C/cm{sup 2} and a coercive field of 125 kV/cm. 21 refs., 6 figs.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 62432
- Report Number(s):
- CONF-9302103-; ISSN 0361-5235; TRN: 95:004351-005
- Journal Information:
- Journal of Electronic Materials, Vol. 23, Issue 9; Conference: 122. annual meeting of the Minerals, Metals and Materials Society (TMS), Denver, CO (United States), 21-25 Feb 1993; Other Information: PBD: Sep 1994
- Country of Publication:
- United States
- Language:
- English
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