Acoustic wave device using plate modes with surface-parallel displacement
Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes there between. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them. 6 figs.
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5117146; A
- Application Number:
- PPN: US 7-719654
- OSTI ID:
- 7207268
- Resource Relation:
- Patent File Date: 21 Jun 1991
- Country of Publication:
- United States
- Language:
- English
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