Acoustic wave device using plate modes with surface-parallel displacement

Title: Acoustic wave device using plate modes with surface-parallel displacement

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Abstract

Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.

Inventors:

Martin, Stephen J ^[1]; Ricco, Antonio J ^[1]

Albuquerque, NM

Publication Date:: 1992-01-01

Research Org.:: AT&T

OSTI Identifier:: 868315

Patent Number(s):: US 5117146

Assignee:: United States of America as represented by United States (Washington, DC)

DOE Contract Number:: AC04-76DP00789

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: acoustic; wave; device; plate; modes; surface-parallel; displacement; solid-state; sensors; monitoring; conditions; surface; immersed; liquid; concentrations; species; electrical; properties; formed; placing; interdigital; input; output; transducers; piezoelectric; substrate; propagating; therebetween; deposition; removal; material; respectively; film; contact; changes; mechanical; characteristics; solution; create; perturbations; velocity; attenuation; function; acoustic plate; plate modes; acoustic wave; mechanical properties; electrical properties; electrical characteristics; wave device; piezoelectric substrate; acoustic sensors; plate mode; monitoring electrical; electrical characteristic; acoustic sensor; /310/73/

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                    Martin, Stephen J, and Ricco, Antonio J. Acoustic wave device using plate modes with surface-parallel displacement.  United States: N. p., 1992. 
        Web.

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                    Martin, Stephen J, & Ricco, Antonio J. Acoustic wave device using plate modes with surface-parallel displacement.  United States.

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                    Martin, Stephen J, and Ricco, Antonio J. Wed .  
        "Acoustic wave device using plate modes with surface-parallel displacement".  United States.  https://www.osti.gov/servlets/purl/868315.

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@article{osti_868315,

  title        = {Acoustic wave device using plate modes with surface-parallel displacement},

  author       = {Martin, Stephen J and Ricco, Antonio J},

  abstractNote = {Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/868315},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1992},

  month        = {1}

}

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