Submicrometer Nb/AlO/sub x//Nb Josephson junction

Journal Article · Mon Aug 01 00:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341792· OSTI ID:7202423

Imamura, T; Hasuo, S

High-quality, submicrometer Nb/AlO/sub x/ /Nb Josephson junctions were fabricated. The junction area was defined by anodizing an upper Nb electrode using a thin SiO/sub 2/ mask. By utilizing the anodized Nb as an etch stop during the reactive ion etching of the contact hole in an SiO/sub 2/ insulator, we could make a junction smaller than the contact hole size. Using stress-free Nb for the junction electrodes was crucial in achieving good current-voltage characteristics. High-quality Nb/AlO/sub x/ /Nb junctions as small as 0.7 ..mu..m square were produced. The quality parameter V/sub m/ was greater than 30 mV for a j/sub c/ of 6800 A/cm/sup 2/.

• Research Organization: Fujitsu Limited, 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
• OSTI ID: 7202423
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:3; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
INTERFACES
JOSEPHSON JUNCTIONS
JUNCTIONS
METALS
NIOBIUM
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTING JUNCTIONS
TRANSITION ELEMENTS