Method for the preparation of protective coatings by low-temperature metal--organic chemical vapor deposition (MOCVD)

Journal Article · Fri Jul 01 04:00:00 EDT 1988 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1139698· OSTI ID:7201823

Kaloyeros, A E; Williams, W S; Constant, G

A simple and effective method is reported for the deposition of protective coatings of titanium carbide using low-temperature (as low as 150 /sup 0/C) metal--organic chemical vapor deposition. This method is based on the thermolysis of metal--organic molecules containing titanium and does not require the high temperature (<1100 /sup 0/C) involved in the standard TiC--CVD technique. Furthermore, the structure of the films produced (crystalline or amorphous) and their purity (inclusion of organic clusters or hydrogen) can be tailored easily by simple variations in the deposition parameters. This technique permits the coating of polymers and low-melting metals that are thermally too fragile for other deposition techniques. The process could be applied to produce films of other materials, e.g., niobium carbide, silicon carbide, titanium diboride, and gallium arsenide.

• Research Organization: Department of Physics and Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
• OSTI ID: 7201823
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 59:7; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
&amp; Refractories-- Preparation &amp; Fabrication
ARSENIC COMPOUNDS
ARSENIDES
BORIDES
BORON COMPOUNDS
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
COATINGS
CRYSTAL STRUCTURE
DECOMPOSITION
DEPOSITION
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
LOW TEMPERATURE
MICROSTRUCTURE
PNICTIDES
PROTECTIVE COATINGS
PYROLYSIS
SILICON CARBIDES
SILICON COMPOUNDS
SURFACE COATING
THERMOCHEMICAL PROCESSES
TITANIUM BORIDES
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS