Metallographic investigation of structural defects in A/sup III/B/sup V/ semiconducting compounds
Journal Article
·
· Inorg. Mater. (Engl. Transl.); (United States)
OSTI ID:7193053
In this article we give the results of a metallographic investigation of the surface layers of InSb and InAs in order to elucidate the main types and characteristics of the defects in the active region of surface-barrier devices. Structural defects in the surfaces of InSb and InAs, which influence the electrophysical characteristics of the MOS structures, can provisionally by attributed to packing defects and clusters of Frenkel defects. Physiocochemical action on the semiconductor may lead to a change in the pattern of revealed defects.
- Research Organization:
- Tomsk State Univ. (USSR)
- OSTI ID:
- 7193053
- Journal Information:
- Inorg. Mater. (Engl. Transl.); (United States), Journal Name: Inorg. Mater. (Engl. Transl.); (United States) Vol. 23:9; ISSN INOMA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360602 -- Other Materials-- Structure & Phase Studies
ALLOYS
ANTIMONY ALLOYS
ARSENIC COMPOUNDS
ARSENIDES
CRYSTAL DEFECTS
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
CZOCHRALSKI METHOD
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELECTRON MOBILITY
ETCHING
HOLE MOBILITY
INDIUM ALLOYS
INDIUM ARSENIDES
INDIUM COMPOUNDS
MEASURING INSTRUMENTS
METALLOGRAPHY
MICROSCOPY
MOBILITY
PARTICLE MOBILITY
PHYSICAL PROPERTIES
PNICTIDES
POINT DEFECTS
RADIATION DETECTORS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DETECTORS
SURFACE BARRIER DETECTORS
SURFACE FINISHING
360102* -- Metals & Alloys-- Structure & Phase Studies
360602 -- Other Materials-- Structure & Phase Studies
ALLOYS
ANTIMONY ALLOYS
ARSENIC COMPOUNDS
ARSENIDES
CRYSTAL DEFECTS
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
CZOCHRALSKI METHOD
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELECTRON MOBILITY
ETCHING
HOLE MOBILITY
INDIUM ALLOYS
INDIUM ARSENIDES
INDIUM COMPOUNDS
MEASURING INSTRUMENTS
METALLOGRAPHY
MICROSCOPY
MOBILITY
PARTICLE MOBILITY
PHYSICAL PROPERTIES
PNICTIDES
POINT DEFECTS
RADIATION DETECTORS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DETECTORS
SURFACE BARRIER DETECTORS
SURFACE FINISHING