Deposition and properties of yttria-stabilized Bi[sub 2]O[sub 3] thin films using reactive direct current magnetron cosputtering

Journal Article · Tue Sep 01 04:00:00 EDT 1992 · Journal of the Electrochemical Society; (United States)

DOI:https://doi.org/10.1149/1.2221265· OSTI ID:7187631

Wang, L S; Barnett, S A ^[1]

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1. Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering

In this paper, yttria-stabilized Bi[sub 2]O[sub 3] (YSB) thin films are deposited using reactive direct current (d.c.) magnetron cosputtering from Y and Bi targets. The films were deposited in argon/oxygen sputtering gas mixtures onto silica glass, NaCl, and MgO substrates. (Y[sub 2]O[sub 3])[sub x](Bi[sub 2]O[sub 3])[sub 1 [minus] x] thin films with x = 0.25-0.5 were obtained under metallic mode sputtering conditions, but were found to be [approx]10% oxygen deficient. Post-deposition annealing in air at T[approx gt] 500[degrees]C led to fully stoichiometric films. X-ray diffraction and transmission electron microscope (TEM) studies showed that the structure of the annealed films was cubic with lattice parameters following Vegar's law. The films were dense as judged by scanning electron microscope (SEM) and TEM. Complex impedance spectroscopy measurements were carried out in air on x = 0.25 films with Ag-(La[sub 0.7]Sr[sub 0.3])CoO[sub 3] cermet electrodes. The temperature dependent ionic conductivity exhibited a knee point at T[sub d] [approx]870[degrees]K, with activation energies of 1.2 eV below T[sub d] and 0.96 eV above T[sub d], in good agreement with values for bulk YSB with the same composition. The interfacial resistance of the cermet with 30 volume percent (v/o) AG on a YSB electrolyte thin film [approx]0.3 [Omega] cm[sup 2] at 750[degrees]C.

• OSTI ID: 7187631
• Journal Information: Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 139:9; ISSN JESOAN; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
664400 -- Experimentally Derived Information on Atomic & Molecular Properties-- (1992-)
665300 -- Interactions Between Beams & Condensed Matter-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALI METAL COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
ALLOYS
ARGON
BISMUTH COMPOUNDS
BISMUTH OXIDES
CHALCOGENIDES
CHLORIDES
CHLORINE COMPOUNDS
COHERENT SCATTERING
DIFFRACTION
DISPERSIONS
ELECTRON MICROSCOPY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
FLUIDS
GASES
HALIDES
HALOGEN COMPOUNDS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROSCOPY
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MIXTURES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
RARE GASES
SCANNING ELECTRON MICROSCOPY
SCATTERING
SODIUM CHLORIDES
SODIUM COMPOUNDS
SPECTROSCOPY
SPUTTERING
SUBSTRATES
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
YTTRIUM ADDITIONS
YTTRIUM ALLOYS