Ion chemistry in SF/sub 6/ corona
Conference
·
OSTI ID:7182643
Although SF/sub 6//sup -/ is known to be the major negative charge carrier initially produced by electron attachment, the subsequent ion chemistry of SF/sub 6/ corona is not completely established. Recent efforts to model the yield of the neutral by-product SOF/sub 4/ in SF/sub 6/ corona suggest that reactions of SF/sub 6//sup -/ with SOF/sub 4/ can be an important factor on the model. Reactions of SF/sub 6//sup -/, with various species that are either present initially in the gas or are produced by the corona and allowed to accumulate, result in the formation of stable product ions. To this end, negative ions produced by corona discharges in SF/sub 6/ have been studied by mass spectrometry in the pressure range 1.6-20 kPa (12-150 torr). 9 refs., 5 figs., 2 tabs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 7182643
- Report Number(s):
- CONF-880948-3; ON: DE88015297
- Country of Publication:
- United States
- Language:
- English
Similar Records
Ion-molecule reactions in SF{sub 6} corona discharges and their potential relevance to plasma processing
Influence of water vapor and decomposition products on the positive- and negative-ion spectra of SF/sub 6/ corona
Negative ion formation in SF/sub 6/ spark by-products
Journal Article
·
Tue Nov 30 23:00:00 EST 1993
· Bulletin of the American Physical Society
·
OSTI ID:67839
Influence of water vapor and decomposition products on the positive- and negative-ion spectra of SF/sub 6/ corona
Conference
·
Sat Dec 31 23:00:00 EST 1988
·
OSTI ID:5851534
Negative ion formation in SF/sub 6/ spark by-products
Conference
·
Sat Dec 31 23:00:00 EST 1983
·
OSTI ID:6970612
Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400400 -- Electrochemistry
640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
CHEMICAL REACTIONS
CORONA DISCHARGES
ELECTRIC DISCHARGES
ELECTRON ATTACHMENT
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
MASS SPECTROSCOPY
SPECTROSCOPY
SULFUR COMPOUNDS
SULFUR FLUORIDES
400400 -- Electrochemistry
640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
CHEMICAL REACTIONS
CORONA DISCHARGES
ELECTRIC DISCHARGES
ELECTRON ATTACHMENT
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
MASS SPECTROSCOPY
SPECTROSCOPY
SULFUR COMPOUNDS
SULFUR FLUORIDES