Ion-molecule reactions in SF{sub 6} corona discharges and their potential relevance to plasma processing

Journal Article · Wed Dec 01 04:00:00 EST 1993 · Bulletin of the American Physical Society

OSTI ID:67839

Sauers, I ^[1]

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1. Oak Ridge National Lab., TN (United States)

Work on SF{sub 6} ion chemistry in corona discharge at high pressure (several kPa) indicate that ions are rapidly converted to product ions whose nature depends on impurities such as water and SF{sub 6} decomposition products. This is true for both positive and negative ions. Depending on the various neutral species present, their concentration, and on the their residence time, conversion of SF{sub 6} ions (SF{sub 6}{sup {minus}}, SF{sub 5}{sup {minus}}, F{sup {minus}}, SF{sub 5}{sup +}) to product ions such as SF{sub 6}{sup {minus}}(HF), SOF{sub 5}{sup {minus}}, F(HF){sub 2}, OH{sup {minus}}(H{sub 2}O){sub 2}, SiF{sub 5}{sup {minus}}, WF{sub 7}{sup {minus}} (when the electrode is W), SF{sub 5}{sup +}(H{sub 2}O){sub 2}, SOF{sub 3}{sup +}, H{sup +}(H{sub 2}O){sub 2}, and SF{sub 5}{sup +}(SF{sub 4}) have been observed. Control in the formation of these ions could be utilized in plasma processing for example through the addition of additives (e.g., HF, H{sub 2}O, SOF{sub 4}, SiF{sub 4}, SF{sub 4}).

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 67839
• Report Number(s): CONF-9310400--
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 13 Vol. 38; ISSN BAPSA6; ISSN 0003-0503
• Country of Publication: United States
• Language: English

Related Subjects

40 CHEMISTRY
CHEMICAL REACTIONS
CORONA DISCHARGES
SULFUR FLUORIDES