Microstructural evolution of Pb(Zr,Ti)O sub 3 thin films prepared by hybrid metallo-organic decomposition

Journal Article · Wed Jul 01 00:00:00 EDT 1992 · Journal of Materials Research; (United States)

DOI:https://doi.org/10.1557/JMR.1992.1876· OSTI ID:7165100

Tuttle, B A; Headley, T J; Bunker, B C; Schwartz, R W; Zender, T J; Hernandez, C L; Goodnow, D C; Tissot, R J; Michael, J ^[1]; Carim, A H ^[2]

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1. Sandia National Laboratory, P. O. Box 5800, Albuquerque, New Mexico 87185 (United States)
2. Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)

We report on the microstructural analyses of chemically prepared Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3} (PZT 53/47) films. Although several techniques were used to analyze films, transmission electron microscopy (TEM) was emphasized. Phase evolution of these films, fabricated using hybrid metallo-organic decomposition (HMD), was determined by processing films at temperatures ranging from 500 {degree}C to 650 {degree}C. Our films, when observed with an optical microscope, appeared to consist of two distinct phases: (1) a featureless matrix and (2) 1--2 {mu}m diameter rosettes.'' PZT films fired at 500 {degree}C consisted of a pyrochlore containing phase (featureless matrix) and contained no perovskite, whereas films fired at 600 {degree}C were ferroelectric and were approximately 90% perovskite (rosettes) by volume. Our TEM analysis showed that the pyrochlore-containing phase consisted of interpenetrating nanocrystalline pyrochlore and amorphous phases, both with dimensions on the order of 5 nm. For PZT films processed at 650 {degree}C, the perovskite phase was observed in two forms: (1) large ({approx}2 {mu}m) rosette structures containing 30 nm pores and (2) dense equiaxed particles on the order of 100 nm. We propose that phase evolution---with increasing temperature of HMD PZT 53/47 films---consists of the following steps: (1) phase separation, probably occurring in solution, (2) pyrochlore crystallization, (3) heterogeneous nucleation of perovskite PZT, and (4) homogeneous nucleation of perovskite PZT.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 7165100
• Journal Information: Journal of Materials Research; (United States), Journal Name: Journal of Materials Research; (United States) Vol. 7:7; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
CHALCOGENIDES
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
FILMS
LEAD COMPOUNDS
LEAD OXIDES
MICROSCOPY
MICROSTRUCTURE
MINERALS
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PYROCHEMICAL REPROCESSING
PYROCHLORE
REPROCESSING
SEPARATION PROCESSES
TEMPERATURE RANGE
TEMPERATURE RANGE 0400-1000 K
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES