Electric fields in high-frequency parallel-plate helium discharges

Journal Article · Sat Oct 01 00:00:00 EDT 1994 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.357351· OSTI ID:7158411

Hebner, G A; Greenberg, K E; Riley, M E ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185-0601 (United States)

Spatially and temporally resolved electric fields in the sheath region of a 13.56-MHz, parallel-plate helium discharge have been measured as a function of voltage, pressure, phase, bias, and electrode drive configuration. The electric field was determined from laser-induced fluorescence measurements of the Stark structure of the [ital n]=11 singlet Rydberg manifold. Two-dimensional maps of the electric field indicate that the field is uniform across a large fraction of the electrode diameter. Measured values of the sheath electric field are compared with the results of a hybrid Boltzmann-equation--average-equation simulation.

• DOE Contract Number: AC04-94AL85000
• OSTI ID: 7158411
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 76:7; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

661300* -- Other Aspects of Physical Science-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION SPECTROSCOPY
ENERGY LEVELS
EXCITED STATES
FLUIDS
FLUORESCENCE SPECTROSCOPY
GASES
HELIUM
HIGH-FREQUENCY DISCHARGES
LASER RADIATION
NONMETALS
PLASMA DIAGNOSTICS
PRESSURE DEPENDENCE
RADIATIONS
RARE GASES
RYDBERG STATES
SPECTROSCOPY
STARK EFFECT