Behavior of titanium sublimation and sputter ion pumps in the 10/sup -11/ torr range

Conference · Thu Jan 01 04:00:00 EST 1976

OSTI ID:7152287

Halama, H J

In the proposed Intersecting Storage Accelerator, ISABELLE, 1200 pumping stations will be used to keep two 3 km long rings at a pressure of 1 x 10/sup -11/ torr. It is clear that in such a large system, price and simplicity are very important. A study was made on a well instrumented room temperature vacuum system with a surface area of 6000 cm/sup 2/ and a volume of 17 l, pumped by a Ti-ball and an ion pump. Total pressure and residual gas composition were measured by a Helmer gauge and a quadrupole mass spectrometer. The final pressures of approximately 1 x 10/sup -11/ torr were reached with Ti films and a 20 l s/sup -1/ sputter-ion pump. The main residual gas components were hydrogen and methane. The ultimate pressure was determined primarily by the ability of Ti films to pump H/sub 2/ which depends on the method of laying down the film and the surface temperature. Previous surface preparation seemed relatively unimportant. Two methods of pumping CH/sub 4/ were investigated: (1) cracking the molecules on hot tungsten filament; and (2) conventional sputter-ion pumping. Sputter-ion pumping was found to be more efficient and preferable.

• Research Organization: Brookhaven National Lab., Upton, N.Y. (USA)
• DOE Contract Number: E(30-1)-16
• OSTI ID: 7152287
• Report Number(s): BNL-21615; CONF-760921-2
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420700 -- Engineering-- Vacuum Engineering-- (-1987)
43 PARTICLE ACCELERATORS
430400* -- Particle Accelerators-- Storage Rings
ELEMENTS
GETTERS
ISABELLE STORAGE RINGS
LABORATORY EQUIPMENT
MASS SPECTROMETERS
MEASURING INSTRUMENTS
METALS
PERFORMANCE TESTING
PRESSURE GAGES
PUMPS
SPECTROMETERS
SPUTTER-ION PUMPS
STORAGE RINGS
TESTING
TITANIUM
TRANSITION ELEMENTS
ULTRAHIGH VACUUM
VACUUM PUMPS
VACUUM SYSTEMS