Superconducting thin-film multiturn coils of YBa sub 2 Cu sub 3 O sub 7 minus x

Journal Article · Mon Jun 04 04:00:00 EDT 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.103247· OSTI ID:7150029

Wellstood, F C; Kingston, J J; Clarke, J ^[1]

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1. Department of Physics, University of California, Berkeley Center for Advanced Materials Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, Berkeley, California 94720 (USA)

We describe a technique for fabricating superconducting thin-film multiturn coils from the high-temperature superconductor YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}}. We have built 10-turn and 19-turn square spiral coils, 1 mm on a side, that are suitable for coupling to a thin-film dc superconducting quantum interference device. The coils are constructed with a three-layer crossover technology using SrTiO{sub 3} as an insulator. Each layer is deposited {ital in} {ital situ} with a pulsed excimer laser, and is patterned with shadow masks or photoresist and an Ar ion mill. The best coil had a transition temperature of approximately 82 K, and a critical current at 77 K of 1.4 mA, corresponding to a critical current density of 2{times}10{sup 4} A cm{sup {minus}2}.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 7150029
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 56:23; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
426001* -- Engineering-- Superconducting Devices & Circuits-- (1990-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
FLUXMETERS
MEASURING INSTRUMENTS
MICROWAVE EQUIPMENT
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SQUID DEVICES
SUPERCONDUCTING COILS
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTING WIRES
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
WIRES
YTTRIUM COMPOUNDS
YTTRIUM OXIDES