Thin-film multilayer interconnect technology for YBa[sub 2]Cu[sub 3]O[sub 7[minus][ital x]]

Journal Article · Sat Jan 15 04:00:00 EST 1994 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.356469· OSTI ID:5403797

Wellstood, F C; Kingston, J J; Clarke, J ^[1]

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1. Department of Physics, University of California, Berkeley, California 94720 (United States) Center for Advanced Materials, Materials Sciences Division, Lawrence Berkeley Laboratory, Berkeley, California 94720 (United States)

The construction of microelectronic circuits from high-transition-temperature ([ital T][sub [ital c]]) superconductors requires techniques for producing thin-film wires, insulating crossovers, and vias (window contacts) between wires. Together, these three components form a superconducting interconnect technology. The challenges encountered in developing such a technology for high-[ital T][sub [ital c]] superconductors involve factors associated with the materials, the circuits and the fabrication techniques. The use of pulsed laser deposition in conjunction with shadow mask patterning, photolithographic pattern definition, acid etching, ion-beam etching, and surface cleaning to produce multilayer interconnects from YBa[sub 2]Cu[sub 3]O[sub 7[minus][ital x]] (YBCO) is discussed. These processes have been used to construct a variety of passive high-temperature superconducting components and circuits, including crossovers, window contacts, multiturn coils, and flux transformers. Integrated magnetometers incorporating superconducting quantum interference devices, multichip modules with semiconductor die bonded to YBCO interconnect structures, and analog-to-digital converters have also been successfully demonstrated.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5403797
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 75:2; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CONDUCTOR DEVICES
CONNECTORS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
EQUIPMENT
ETCHING
FILMS
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
MICROELECTRONIC CIRCUITS
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
SUPERCONDUCTING WIRES
SUPERCONDUCTORS
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
WIRES
YTTRIUM COMPOUNDS
YTTRIUM OXIDES