Acoustic resonator and method of making same

Patent · Tue Mar 05 04:00:00 EST 1985

OSTI ID:7146617

Kline, G R; Lakin, K M

A method is disclosed of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers. 4 figs.

• DOE Contract Number: W-7405-ENG-82
• Assignee: Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 4502932; A
• Application Number: PPN: US 6-541608
• OSTI ID: 7146617
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
ALLOYS
ALUMINIUM ALLOYS
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
ARSENIC COMPOUNDS
ARSENIDES
COMPOSITE MATERIALS
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
MATERIALS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
RESONATORS
SOUND WAVES