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Title: Acoustic resonator and method of making same

Abstract

A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.

Inventors:
;
Publication Date:
OSTI Identifier:
6633642
Alternate Identifier(s):
OSTI ID: 6633642; Legacy ID: DE84014655
Application Number:
ON: DE84014655
Assignee:
Dept. of Energy EDB-84-140314
DOE Contract Number:  
W-7405-ENG-82
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; RESONATORS; DESIGN; FABRICATION; ACOUSTIC MONITORING; ACOUSTICS; ALUMINIUM; GALLIUM ARSENIDES; MECHANICAL STRUCTURES; ARSENIC COMPOUNDS; ARSENIDES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; GALLIUM COMPOUNDS; METALS; MONITORING; PNICTIDES 420200* -- Engineering-- Facilities, Equipment, & Techniques

Citation Formats

Kline, G.R., and Lakin, K.M. Acoustic resonator and method of making same. United States: N. p., 1983. Web.
Kline, G.R., & Lakin, K.M. Acoustic resonator and method of making same. United States.
Kline, G.R., and Lakin, K.M. Thu . "Acoustic resonator and method of making same". United States.
@article{osti_6633642,
title = {Acoustic resonator and method of making same},
author = {Kline, G.R. and Lakin, K.M.},
abstractNote = {A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 13 00:00:00 EDT 1983},
month = {Thu Oct 13 00:00:00 EDT 1983}
}