Development and application of a corrosion susceptibility test for Ta/sub 2/N--Cr--Au hybrid circuit metallization

Technical Report · Wed Sep 01 04:00:00 EDT 1976

OSTI ID:7145676

Palmer, D W; Wright, R E

The thrust of this study was to develop and apply a quantitative test measuring the corrosion susceptibility of the hybrid circuit Ta/sub 2/N--Cr--Au metallization. The test chosen used a processing corrosive solution to leach Cr from the metallization; the amount of Cr leached from each metallization variation was measured using atomic absorption spectroscopy analysis on the etchant. The following deposition and handling parameters of the metallization were varied: storage time after deposition, substrate deposition temperature, post deposition high temperature resistor stabilization, Au thickness, and mode of Au deposition. Any one set of processing procedures always resulted in a similar amount of Cr leaching even though there was as much as a 1000 fold difference in Cr leaching for differently deposited and handled metallization. A direct correlation between the resistance to leaching and lead frame bond pull strengths demonstrated the usefulness of this test as an initial screening step in processing.

• Research Organization: Sandia Labs., Albuquerque, N.Mex. (USA)
• DOE Contract Number: E(29-1)-789
• OSTI ID: 7145676
• Report Number(s): SAND-76-0414
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360105* -- Metals & Alloys-- Corrosion & Erosion
ALKALI METAL COMPOUNDS
ALLOYS
AMMONIUM COMPOUNDS
AMMONIUM NITRATES
AQUEOUS SOLUTIONS
CERIUM COMPOUNDS
CHEMICAL REACTIONS
CHROMIUM ALLOYS
COATINGS
CORROSION
CORROSIVE EFFECTS
DIFFUSION COATINGS
DISPERSIONS
DISSOLUTION
ELECTRONIC CIRCUITS
ETCHING
GOLD ALLOYS
HALIDES
HALOGEN COMPOUNDS
HYDROGEN COMPOUNDS
INORGANIC ACIDS
INORGANIC PHOSPHORS
IODIDES
IODINE COMPOUNDS
LEACHING
MIXTURES
NITRATES
NITRIC ACID
NITRIDES
NITROGEN COMPOUNDS
OXYGEN COMPOUNDS
PHOSPHORS
PNICTIDES
POTASSIUM COMPOUNDS
POTASSIUM IODIDES
RARE EARTH COMPOUNDS
SEPARATION PROCESSES
SOLUTIONS
SURFACE FINISHING
TANTALUM COMPOUNDS
TANTALUM NITRIDES
TRANSITION ELEMENT COMPOUNDS