Two-channel polarization modulation ellipsometer

Journal Article · Thu Mar 01 04:00:00 EST 1990 · Applied Optics; (USA)

DOI:https://doi.org/10.1364/AO.29.000959· OSTI ID:7139146

Jellison, Jr, G E; Modine, F A ^[1]

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1. Oak Ridge National Laboratory, P.O. Box 2008, Solid State Division, Oak Ridge, Tennessee 37831-6056 (USA)

A new wavelength-scanning two-channel polarization modulation ellipsometer is described, where a photoelastic modulator is used and the analyzed light is separated into orthogonally polarized beams using a Wollaston prism. Both beams are detected using phototubes whose bias voltage is dynamically controlled for constant dc. The dc from each phototube is measured with a digital voltmeter, and the fundamental and second harmonic of the phototube current are measured using individual lock-in amplifiers. All three of the associated ellipsometric parameters ({ital N} = cos2{psi}, {ital S} = sin2{psi} sin{Delta}, and {ital C} = sin2{psi} cos{Delta}) can be determined simultaneously in a single scan. The versatility of the instrument is demonstrated by the determination of the optical functions of Si from 238 to 652 nm (5.3--1.9 eV).

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 7139146
• Journal Information: Applied Optics; (USA), Journal Name: Applied Optics; (USA) Vol. 29:7; ISSN 0003-6935; ISSN APOPA
• Country of Publication: United States
• Language: English

Related Subjects

440600* -- Optical Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
ELECTROMAGNETIC RADIATION
ELEMENTS
ELLIPSOMETERS
MEASURING INSTRUMENTS
MODULATION
OPERATION
OPTICAL PROPERTIES
PERFORMANCE
PHYSICAL PROPERTIES
POLARIMETERS
POLARIZATION
RADIATIONS
SEMIMETALS
SILICON
ULTRAVIOLET RADIATION
VISIBLE RADIATION