In-line sputtering system for depositing CuInSe/sub 2//CdS heterojunctions

Journal Article · Fri Oct 31 23:00:00 EST 1986 · J. Sol. Energy Eng.; (United States)

DOI:https://doi.org/10.1115/1.3268104· OSTI ID:7125549

Thornton, J A; Lommasson, T C; Cornog, D G

An in-line deposition system for fabricating all-sputtered CuInSe/sub 2//CdS heterojunctions has been designed and fabricated. The system uses planar magnetron sputtering sources driven with direct currents. The apparatus consists of a vacuum interlock and four processing chambers. A vertically mounted frame containing four 25 mm x 25 mm substrates is introduced through a vacuum interlock and positioned at stationary deposition stations within each of the four processing chambers. One chamber is configured for depositing a metal base electrode. A second camber contains a station for depositing CuInSe/sub 2/ by reactive cosputtering from Cu and In sources in an H/sub 2/Se-Ar atmosphere. The final two chambers are configured for depositing a CdS layer consisting of two sublayers such, for example, as (CdZn)S and In-doped CdS which are deposited by reactive sputtering from Cd-alloy targets in an H/sub 2/S-AR atmosphere. The CuInSe/sub 2/ deposition chamber is isolated from the base electrode and CdS deposition chambers by gate valves to minimize cross contamination. The system has now been operated for over a year with more than three hundred deposition runs having been made, using primarily the CuInSe/sub 2/ deposition chamber. Solar cells with efficiencies up to 6 percent have been fabricated from reactive sputtered CuInSe/sub 2/ layers deposited using the apparatus. The purpose of this paper is to describe the design and operation of the system.

• Research Organization: Dept. of Materials Science and Coordinated Science Lab., Univ. of Illinois, Urbana, IL 61801
• OSTI ID: 7125549
• Journal Information: J. Sol. Energy Eng.; (United States), Journal Name: J. Sol. Energy Eng.; (United States) Vol. 108:4; ISSN JSEED
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
ARGON
CADMIUM COMPOUNDS
CADMIUM SULFIDE SOLAR CELLS
CADMIUM SULFIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER SELENIDE SOLAR CELLS
COPPER SELENIDES
CURRENTS
DEPOSITION
DIRECT CURRENT
DIRECT ENERGY CONVERTERS
ELECTRIC CURRENTS
ELECTRODES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FLUIDS
GASES
HETEROJUNCTIONS
HYDRIDES
HYDROGEN COMPOUNDS
INDIUM COMPOUNDS
INDIUM SELENIDE SOLAR CELLS
INDIUM SELENIDES
INORGANIC PHOSPHORS
JUNCTIONS
LAYERS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
PHOSPHORS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RARE GASES
SELENIDES
SELENIUM COMPOUNDS
SELENIUM HYDRIDES
SEMICONDUCTOR JUNCTIONS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
SUBSTRATES
SULFIDES
SULFUR COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
VACUUM SYSTEMS