High-energy product Sm-Co-based sputtered films, crystal texturing, and magnetic properties

Journal Article · Tue May 01 04:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.344719· OSTI ID:7123655

Cadieu, F J; Hegde, H; Chen, K ^[1]

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1. Physics Department, Queens College of CUNY, Flushing, New York 11367 (USA)

Sm-Co-based sputtered films have been deposited that exhibit a remanence ratio for hysteresis loops measured out of the plane to in the plane of 0.04. These results have been obtained by thermalized sputtering this system in Ar, Ar+Xe mixtures, and in Xe. The use of Xe has allowed a more efficient thermalization of the massive Sm atoms so that a lower total pressure can be used than if Ar were used alone. The use of Ar-Xe mixtures as the sputtering gas has allowed high-energy product Sm{sub 2}(Co, Fe, Cu, Zr){sub 17} films with the TbCu{sub 7}-type crystal structure to be obtained over a much wider range of substrate temperatures and sputtering pressures than has been possible for films sputtered only in Ar. Films sputtered in Ar will show a perpendicular to the in-plane remanence ratio of 0.36 vs 0.04 for Xe. The slope of the hysteresis loops was nearly linear from +18 to {minus}4.5 kOe with values of {minus}0.7%/kOe for the Xe films and a value of {minus}1.2%/kOe for the Ar films. All of these films were directly crystallized onto heated substrates, which is necessary to control the crystal texturing.

• OSTI ID: 7123655
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 67:9; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
ALLOYS
ARGON
COBALT ALLOYS
COPPER ALLOYS
DISPERSIONS
ELECTRON MICROSCOPY
ELEMENTS
FILMS
FLUIDS
GASES
HYSTERESIS
IRON ALLOYS
MAGNETIC PROPERTIES
MICROSCOPY
MIXTURES
NONMETALS
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE GASES
SAMARIUM ALLOYS
SCANNING ELECTRON MICROSCOPY
SPUTTERING
TEXTURE
XENON
ZIRCONIUM ALLOYS