Power density effects in the physical and chemical properties of sputtered diamond-like carbon thin films

Conference · Wed Nov 01 04:00:00 EST 1989

OSTI ID:7121931

Cho, N H; Krishnan, K M; Veirs, D K; Rubin, M D; Hopper, C B; Bhushan, B ^[1]; Bogy, D B ^[2]

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1. Lawrence Berkeley Lab., CA (USA)
2. California Univ., Berkeley, CA (USA). Dept. of Mechanical Engineering

Thin films of diamond-like amorphous carbon were prepared by dc magnetron sputtering. A systematic variation in the physical properties of the films (mass density and electrical resistivity) was found as a function of sputtering power density. Chemical bonding and microstructure of the carbon thin films were investigated using electron energy loss spectroscopy (EELS) and Raman spectroscopy. Films grown at a lower power density were found to have more sp{sup 3}-bonded atomic sites and larger graphite microcrystals than films produced at higher sputtering power densities. 18 refs., 3 figs.

• Research Organization: Lawrence Berkeley Lab., CA (USA)
• Sponsoring Organization: DOE/ER; NSF
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 7121931
• Report Number(s): LBL-28348; CONF-891119--133; ON: DE90011587; CNN: MSE-8800149
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360603* -- Materials-- Properties
CARBON
CHEMICAL BONDS
CHEMICAL PROPERTIES
CRYSTAL STRUCTURE
DIAMONDS
ELECTRON SPECTROSCOPY
ELEMENTAL MINERALS
ELEMENTS
ENERGY-LOSS SPECTROSCOPY
FILMS
MICROSTRUCTURE
MINERALS
NONMETALS
PHYSICAL PROPERTIES
RAMAN SPECTRA
SPECTRA
SPECTROSCOPY
SPUTTERING
THIN FILMS