Optical coating materials for the ultraviolet - selection and characterization
Experiences at Pacific Northwest Laboratory in the selection, deposition and characterization of oxide optical coatings for use with excimer lasers are reviewed. Fabrication results for all-dielectric high reflectors at 248 and 308 nm are presented. Glassy or amorphous coating materials such as SiO/sub 2/ and Ta/sub 2/O/sub 5/ appear to be more promising for ultraviolet use than polycrystalline materials such as Y/sub 2/O/sub 3/, Al/sub 2/O/sub 3/, ZrO/sub 2/ and HfO/sub 2/ because of reduced surface roughness. Glassy materials, formed by ion bombardment or by mixing oxides according to the method of Sanders, Farabaugh and Haller, appear to be a promising direction for future ultraviolet coating development.
- Research Organization:
- Pacific Northwest Lab., Richland, WA (USA)
- DOE Contract Number:
- AC06-76RL01830
- OSTI ID:
- 7118776
- Report Number(s):
- PNL-SA-12218; CONF-8405158-1; ON: DE84011504
- Resource Relation:
- Conference: SPIE technical symposium, Arlington, VA, USA, 1 May 1984; Other Information: Portions are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
Similar Records
The response of multilayer dielectric coatings to low fluence uv light exposure
Development of damage resistant sputtered oxide optical coatings for use at 248 NM