Multilayered plating thickness measurement
A nondestructive method for measuring multilayered plating thickness has been developed utilizing intensity measurements made with an x-ray fluorescence spectrometer. A series of multilayered platings was fabricated, and the thickness of each was determined through the use of a Link gage block interferometer. These samples were used in experiments to determine the absorption and enhancement effects that are present when an x-ray fluorescence spectrometer is used to measure the thickness of a multilayered plating. The results of the investigation indicated that enhancement corrections must be applied to x-ray measurements of gold thickness up to 20 microinches (508 nm). The effect of absorption of the rhodium K-Alpha line in the gold layer was found to have an insignificant effect on the measurement of rhodium thickness; corrections are not needed. Present technology results in an ability to detect a 1-microinch (25.4 nm) change in gold thickness with an estimated calibration uncertainty (bias) of +-4 microinches (+-101.6 nm). The thickness of the rhodium underplate can be determined with an estimated uncertainty of +-10 microinches (254 nm). Additional work is being performed to establish confidence in the plating-thickness measurement method that has been developed.
- Research Organization:
- Bendix Corp., Kansas City, MO (USA)
- DOE Contract Number:
- EY-76-C-04-0613
- OSTI ID:
- 7094632
- Report Number(s):
- BDX-613-1632(Rev.)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420200* -- Engineering-- Facilities
Equipment
& Techniques
COATINGS
DEPOSITION
DIMENSIONS
ELEMENTS
EMISSION SPECTROSCOPY
FLUORESCENCE SPECTROSCOPY
GOLD
LAYERS
MEASURING INSTRUMENTS
MEASURING METHODS
METALS
NICKEL
PERFORMANCE
PLATING
PLATINUM METALS
REFRACTORY METALS
RHODIUM
SPECTROMETERS
SPECTROSCOPY
SURFACE COATING
THICKNESS
THICKNESS GAGES
TRANSITION ELEMENTS
USES
X-RAY SPECTROMETERS
420200* -- Engineering-- Facilities
Equipment
& Techniques
COATINGS
DEPOSITION
DIMENSIONS
ELEMENTS
EMISSION SPECTROSCOPY
FLUORESCENCE SPECTROSCOPY
GOLD
LAYERS
MEASURING INSTRUMENTS
MEASURING METHODS
METALS
NICKEL
PERFORMANCE
PLATING
PLATINUM METALS
REFRACTORY METALS
RHODIUM
SPECTROMETERS
SPECTROSCOPY
SURFACE COATING
THICKNESS
THICKNESS GAGES
TRANSITION ELEMENTS
USES
X-RAY SPECTROMETERS