Sputtering of neutral and ionic indium clusters

Journal Article · Fri Jul 01 04:00:00 EDT 1994 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.579185· OSTI ID:7079539

Ma, Z; Coon, S R; Calaway, W F; Pellin, M J; Gruen, D M; von Nagy-Felsobuki, E I ^[1]

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1. Materials Science, Chemical Technology, and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439 (United States)

Secondary neutral and secondary ion cluster yields were measured during the sputtering of a polycrystalline indium surface by normally incident [similar to]4 keV Ar[sup +] ions. In the secondary neutral mass spectra, indium clusters as large as In[sub 32] were observed. In the secondary ion mass spectra, indium clusters up to In[sub 18][sup +] were recorded. Cluster yields obtained from both the neutral and ion channel exhibited a power law dependence on the number of constituent atoms [ital n] in the cluster, with the exponents measured to be [minus]5.6 and [minus]4.1, respectively. An abundance drop was observed at [ital n]=8, 15, and 16 in both the neutral and ion yield distributions, suggesting that the stability of the ion (either secondary ion or photoion) plays a significant role in the observed distributions. In addition, our experiments suggest that unimolecular decomposition of the neutral cluster may also play an important role in the measured yield distributions.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 7079539
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 12:4; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

665300* -- Interactions Between Beams & Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
ATOMIC CLUSTERS
CHARGED PARTICLES
COLLISIONS
ELEMENTS
ENERGY RANGE
INDIUM
ION PAIRS
IONS
KEV RANGE
KEV RANGE 01-10
MASS SPECTRA
METALS
SPECTRA
SPUTTERING