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U.S. Department of Energy
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Hard carbon nitride and method for preparing same

Patent ·
OSTI ID:7072508
Novel crystalline [alpha](silicon nitride-like)-carbon nitride and [beta](silicon nitride-like)-carbon nitride are formed by sputtering carbon in the presence of a nitrogen atmosphere onto a single crystal germanium or silicon, respectively, substrate. 1 figure.
DOE Contract Number:
AC03-76SF00098
Assignee:
Univ. of California, Berkeley, CA (United States)
Patent Number(s):
US 5110679; A
Application Number:
PPN: US 7-513245
OSTI ID:
7072508
Country of Publication:
United States
Language:
English