Modeling and diagnostics of the structure of rf glow discharges in Ar at 13. 56 MHz

Journal Article · Sat Feb 15 00:00:00 EST 1992 · Physical Review A. General Physics; (United States)

DOI:https://doi.org/10.1103/PhysRevA.45.2520· OSTI ID:7049285

Makabe, T; Nakano, N ^[1]; Yamaguchi, Y ^[2]

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1. Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Hiyoshi, Yokohama 223 (Japan)
2. Research Center, Mitsubishi Kasei Corporation, 1000 Kamoshida, Yokohama 227 (Japan)

The structure of rf glow discharges in Ar at 13.56 MHz is described, making use of a relaxation continuum model. The model includes consideration of the relaxation kinetics for the momentum and energy of charged particles. The discharge structure and plasma property are modeled using molecular quantities (i.e., collision cross sections, radiative lifetimes, etc.) and macroscopic transport quantities for charged particles. Spatiotemporal distributions for the field and the net production rate and density of particles are studied in detail in the bulk plasma as well as the ion sheath under periodic steady-state conditions. In particular, the temporal profiles including phase shift and nonlinear variation with respect to the applied-voltage wave form are discussed. Each type of excited atom shows a different spatiotemporal density distribution due to different loss mechanisms, although the production profiles are similar. That is, Ar({sup 3}{ital p}{sub 5}) is controlled by a radiative decay and quenching in collisions with Ar({sup 1}{ital S}{sub 0}), while Ar({sup 3}{ital P}{sub 0,2}) is controlled by diffusion. The validity of the relaxation continuum model is investigated by the observation of external electric properties and the measurement of spatiotemporally resolved optical emission from the rf glow. Quantitative comparison of the results from theory and experiment supports the validity of the relaxation continuum model. The relaxation continuum model is simple and physically reasonable.

• OSTI ID: 7049285
• Journal Information: Physical Review A. General Physics; (United States), Vol. 45:4; ISSN 1050-2947
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
GLOW DISCHARGES
COLLISIONAL PLASMA
PLASMA DIAGNOSTICS
PLASMA SIMULATION
SIMULATION
HIGH-FREQUENCY DISCHARGES
KINETICS
RF SYSTEMS
ELECTRIC DISCHARGES
ELEMENTS
FLUIDS
GASES
NONMETALS
PLASMA
RARE GASES
661300* - Other Aspects of Physical Science- (1992-)